JPH042988U - - Google Patents
Info
- Publication number
- JPH042988U JPH042988U JP4269690U JP4269690U JPH042988U JP H042988 U JPH042988 U JP H042988U JP 4269690 U JP4269690 U JP 4269690U JP 4269690 U JP4269690 U JP 4269690U JP H042988 U JPH042988 U JP H042988U
- Authority
- JP
- Japan
- Prior art keywords
- mover
- electrostatic actuator
- stator
- electrodes arranged
- insulators
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims description 2
- 239000011295 pitch Substances 0.000 claims 2
- 150000002739 metals Chemical class 0.000 claims 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Micromachines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4269690U JPH042988U (en]) | 1990-04-20 | 1990-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4269690U JPH042988U (en]) | 1990-04-20 | 1990-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH042988U true JPH042988U (en]) | 1992-01-10 |
Family
ID=31554465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4269690U Pending JPH042988U (en]) | 1990-04-20 | 1990-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH042988U (en]) |
-
1990
- 1990-04-20 JP JP4269690U patent/JPH042988U/ja active Pending